Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass
文献类型：期刊论文
| 作者 | Wang, Linqing ; Wang, Weiyan ; Huang, Jinhua ; Zeng, Yuheng ; Tan, Ruiqin ; Song, Weijie ; Chen, Jianmin |
| 刊名 | JOURNAL OF NON-CRYSTALLINE SOLIDS
 |
| 出版日期 | 2014 |
| 卷号 | 388页码:86 |
| 中文摘要 | Hydrogenated microcrystalline silicon (mu c-Si:H) thin films were deposited on glass by magnetron sputtering at the substrate temperature of 100 degrees C and the hydrogen dilution ratio of 65%. The crystallinity and microstructure of thin films were systematically studied using Raman spectroscopy, X-ray diffraction (XRD), transmission electron microscopy (TEM), and Fourier transform infrared spectroscopy (FT-IR). The results showed that the mu c-Si:H thin film was amorphous and hydrogen-rich at the initial stage of the growth. This amorphous layer was crystallized during further growth. The crystallinity of thin films is not almost changed with the increase of thickness when the thickness of thin film exceeds 70 nm. Finally, the mu c-Si:H thin film without amorphous incubation layer was obtained. The possible growth mechanism of fabricating mu c-Si:H thin films without amorphous incubation layers was also discussed. (C) 2014 Elsevier B.V. All rights reserved. |
| 公开日期 | 2015-09-20 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/11903]  |
| 专题 | 宁波材料技术与工程研究所_2014专题 |
| 推荐引用方式 GB/T 7714 | Wang, Linqing,Wang, Weiyan,Huang, Jinhua,et al. Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2014,388:86. |
| APA | Wang, Linqing.,Wang, Weiyan.,Huang, Jinhua.,Zeng, Yuheng.,Tan, Ruiqin.,...&Chen, Jianmin.(2014).Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass.JOURNAL OF NON-CRYSTALLINE SOLIDS,388,86. |
| MLA | Wang, Linqing,et al."Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass".JOURNAL OF NON-CRYSTALLINE SOLIDS 388(2014):86. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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