Ultra-thin (002)-oriented Al-doped zinc oxide transparent electrode grown on oxygen-controlled homo-seed layer
文献类型：期刊论文
| 作者 | Wang, Muqin ; Yang, Ye ; Lan, Pinjun ; Zhu, Ke ; Huang, Jinhua ; Lu, Yuehui ; Tan, Ruiqin ; Song, Weijie |
| 刊名 | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
 |
| 出版日期 | 2014 |
| 卷号 | 8期号:2页码:172 |
| 中文摘要 | Highly (002)-oriented Al-doped zinc oxide (AZO) thin films with the thickness of less than 200 nm have been deposited on an oxygen-controlled homo-seed layer at 200 degrees C by DC magnetron sputtering. With the homo-seed layer being employed, the full-width at half maximum (FWHM) of the (002) diffraction peak for the AZO ultra-thin films decreased from 0.33 degrees to 0.22 degrees, and, the corresponding average grain size increased from 26.8 nm to 43.0 nm. The XRD rocking curves revealed that the AZO ultra-thin film grown on the seed layer deposited in atmosphere of O-2/Ar of 0.09 exhibited the most excellent structural order. The AZO ultra-thin film with homo-seed layer reached a resistivity of 4.2 x 10(-4) cm, carrier concentration of 5.2 x 10(20) cm(-3) and mobility of 28.8 cm(2) V-1 s(-1). The average transmittance of the AZO ultra-thin film with homo-seed layer reached 85.4% in the range of 380-780 nm including the substrate. ((c) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) |
| 公开日期 | 2015-09-20 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/11944]  |
| 专题 | 宁波材料技术与工程研究所_2014专题 |
| 推荐引用方式 GB/T 7714 | Wang, Muqin,Yang, Ye,Lan, Pinjun,et al. Ultra-thin (002)-oriented Al-doped zinc oxide transparent electrode grown on oxygen-controlled homo-seed layer[J]. PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS,2014,8(2):172. |
| APA | Wang, Muqin.,Yang, Ye.,Lan, Pinjun.,Zhu, Ke.,Huang, Jinhua.,...&Song, Weijie.(2014).Ultra-thin (002)-oriented Al-doped zinc oxide transparent electrode grown on oxygen-controlled homo-seed layer.PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS,8(2),172. |
| MLA | Wang, Muqin,et al."Ultra-thin (002)-oriented Al-doped zinc oxide transparent electrode grown on oxygen-controlled homo-seed layer".PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS 8.2(2014):172. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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