Adhesion-Induced Failure of the Slender MEMS Structures
文献类型：会议论文
| 作者 | Liu Y; Zhang Y(张吟)
|
| 出版日期 | 2014 |
| 会议名称 | International Conference on Mechanical Design Manufacture and Automation Engineering |
| 会议日期 | JAN 11-12 2014 |
| 会议地点 | Phuket THAILAND |
| 关键词 | Adhesion Stiction S-shape Arc-shape |
| 通讯作者 | liuyunkm@126.com ; zhangyin@lnm.imech.ac.cn |
| 中文摘要 | Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems device. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolves some disputations on the previous models. |
| 收录类别 | CPCI |
| 会议录 | INTERNATIONAL CONFERENCE ON MECHANICAL DESIGN MANUFACTURE AND AUTOMATION ENGINEERING
 |
| 会议录出版者 | DESTECH PUBLICATIONS INC |
| 会议录出版地 | LANCASTER |
| 语种 | 英语 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/55361]  |
| 专题 | 力学研究所_非线性力学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Liu Y,Zhang Y. Adhesion-Induced Failure of the Slender MEMS Structures[C]. 见:International Conference on Mechanical Design Manufacture and Automation Engineering. Phuket THAILAND. JAN 11-12 2014. |
入库方式： OAI收割
来源：力学研究所
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