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Selective metallization on insulator surfaces with femtosecond laser pulses

文献类型:期刊论文

作者Xu Jian ; Liao Yang ; Ceng HD(曾惠丹) ; Zhou Zenghui ; Sun Haiyi ; Song Juan ; Wang Xinshun ; Cheng Y(程亚) ; Xu ZZ(徐至展) ; Sugioka Koji ; Midorikawa Katsumi
刊名opt. express
出版日期2007
卷号15期号:20页码:12743
关键词TRANSPARENT MATERIALS GLASS COPPER DEPOSITION DIELECTRICS POLYIMIDE OPTICS
ISSN号1094-4087
中文摘要we report selective metallization on surfaces of insulators ( glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. the process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. we discuss the mechanism of selective metallization on the insulators. moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices. (c) 2007 optical society of america.
收录类别EI
语种英语
WOS记录号WOS:000250006700019
公开日期2009-09-18
源URL[http://ir.siom.ac.cn/handle/181231/982]  
专题上海光学精密机械研究所_强场激光物理国家重点实验室
推荐引用方式
GB/T 7714
Xu Jian,Liao Yang,Ceng HD,et al. Selective metallization on insulator surfaces with femtosecond laser pulses[J]. opt. express,2007,15(20):12743, 12748.
APA Xu Jian.,Liao Yang.,曾惠丹.,Zhou Zenghui.,Sun Haiyi.,...&Midorikawa Katsumi.(2007).Selective metallization on insulator surfaces with femtosecond laser pulses.opt. express,15(20),12743.
MLA Xu Jian,et al."Selective metallization on insulator surfaces with femtosecond laser pulses".opt. express 15.20(2007):12743.

入库方式: OAI收割

来源:上海光学精密机械研究所

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