中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Measurement of Thermal Conductivity of Anisotropic SiC Crystal

文献类型:期刊论文

作者Su, Guo-Ping1,2,3; Zheng, Xing-Hua1,2; Qiu, Lin1,2; Tang, Da-Wei1; Zhu, Jie1
刊名INTERNATIONAL JOURNAL OF THERMOPHYSICS
出版日期2013-12-01
卷号34期号:12页码:2334-2342
关键词3 omega Method Anisotropic SiC crystal Thermal conductivity
英文摘要Silicon carbide (SiC) crystals with excellent heat conduction and thermal stability can be widely used in microelectronic devices and integrated circuits. It is important for the study of a functional type SiC material to have accurate thermal-conductivity and thermal-diffusivity values of SiC crystal. A 3 omega technique is employed to determine the anisotropic thermal conductivity of SiC crystal. Three micrometal probes with different widths are deposited by chemical-vapor deposition on the surface of SiC crystal. Each micrometal probe is used as a heater, and also as a thermometer. The temperature fluctuation signals of a micrometal probe represent heat conduction in different directions in the specimen. Thermal conductivities both in the cross-plane and in-plane directions of SiC crystal are achieved through fitted values. The results indicate that thermal conductivities in three different directions of SiC crystal can be characterized using the metal heater construction.
WOS标题词Science & Technology ; Physical Sciences ; Technology
类目[WOS]Thermodynamics ; Chemistry, Physical ; Mechanics ; Physics, Applied
研究领域[WOS]Thermodynamics ; Chemistry ; Mechanics ; Physics
关键词[WOS]3-OMEGA METHOD ; SILICON-CARBIDE ; THIN-FILMS
收录类别SCI
语种英语
WOS记录号WOS:000328202300009
源URL[http://ir.etp.ac.cn/handle/311046/98825]  
专题工程热物理研究所_中国科学院工程热物理所(论文库)_期刊论文(SCI)
作者单位1.Chinese Acad Sci, Inst Engn Thermophys, Beijing 100190, Peoples R China
2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
3.Yanshan Univ, Coll Vehicles & Energy, Qinhuangdao, Hebei, Peoples R China
推荐引用方式
GB/T 7714
Su, Guo-Ping,Zheng, Xing-Hua,Qiu, Lin,et al. Measurement of Thermal Conductivity of Anisotropic SiC Crystal[J]. INTERNATIONAL JOURNAL OF THERMOPHYSICS,2013,34(12):2334-2342.
APA Su, Guo-Ping,Zheng, Xing-Hua,Qiu, Lin,Tang, Da-Wei,&Zhu, Jie.(2013).Measurement of Thermal Conductivity of Anisotropic SiC Crystal.INTERNATIONAL JOURNAL OF THERMOPHYSICS,34(12),2334-2342.
MLA Su, Guo-Ping,et al."Measurement of Thermal Conductivity of Anisotropic SiC Crystal".INTERNATIONAL JOURNAL OF THERMOPHYSICS 34.12(2013):2334-2342.

入库方式: OAI收割

来源:工程热物理研究所

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