Measurement of Thermal Conductivity of Anisotropic SiC Crystal
文献类型：期刊论文
| 作者 | Su, Guo-Ping1,2,3; Zheng, Xing-Hua1,2; Qiu, Lin1,2; Tang, Da-Wei1; Zhu, Jie1 |
| 刊名 | INTERNATIONAL JOURNAL OF THERMOPHYSICS
 |
| 出版日期 | 2013-12-01 |
| 卷号 | 34期号:12页码:2334-2342 |
| 关键词 | 3 omega Method Anisotropic SiC crystal Thermal conductivity |
| 英文摘要 | Silicon carbide (SiC) crystals with excellent heat conduction and thermal stability can be widely used in microelectronic devices and integrated circuits. It is important for the study of a functional type SiC material to have accurate thermal-conductivity and thermal-diffusivity values of SiC crystal. A 3 omega technique is employed to determine the anisotropic thermal conductivity of SiC crystal. Three micrometal probes with different widths are deposited by chemical-vapor deposition on the surface of SiC crystal. Each micrometal probe is used as a heater, and also as a thermometer. The temperature fluctuation signals of a micrometal probe represent heat conduction in different directions in the specimen. Thermal conductivities both in the cross-plane and in-plane directions of SiC crystal are achieved through fitted values. The results indicate that thermal conductivities in three different directions of SiC crystal can be characterized using the metal heater construction. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Thermodynamics ; Chemistry, Physical ; Mechanics ; Physics, Applied |
| 研究领域[WOS] | Thermodynamics ; Chemistry ; Mechanics ; Physics |
| 关键词[WOS] | 3-OMEGA METHOD ; SILICON-CARBIDE ; THIN-FILMS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000328202300009 |
| 源URL | [http://ir.etp.ac.cn/handle/311046/98825]  |
| 专题 | 工程热物理研究所_中国科学院工程热物理所（论文库）_期刊论文（SCI） |
| 作者单位 | 1.Chinese Acad Sci, Inst Engn Thermophys, Beijing 100190, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China 3.Yanshan Univ, Coll Vehicles & Energy, Qinhuangdao, Hebei, Peoples R China |
| 推荐引用方式 GB/T 7714 | Su, Guo-Ping,Zheng, Xing-Hua,Qiu, Lin,et al. Measurement of Thermal Conductivity of Anisotropic SiC Crystal[J]. INTERNATIONAL JOURNAL OF THERMOPHYSICS,2013,34(12):2334-2342. |
| APA | Su, Guo-Ping,Zheng, Xing-Hua,Qiu, Lin,Tang, Da-Wei,&Zhu, Jie.(2013).Measurement of Thermal Conductivity of Anisotropic SiC Crystal.INTERNATIONAL JOURNAL OF THERMOPHYSICS,34(12),2334-2342. |
| MLA | Su, Guo-Ping,et al."Measurement of Thermal Conductivity of Anisotropic SiC Crystal".INTERNATIONAL JOURNAL OF THERMOPHYSICS 34.12(2013):2334-2342. |
入库方式： OAI收割
来源：工程热物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。