Simultaneous determination of thermal conductivities of thin film and substrate by extending 3 omega-method to wide-frequency range
文献类型：期刊论文
| 作者 | Wang, Zhao Liang; Tang, Da Wei; Zheng, Xing Hua |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2007-09-15 |
| 卷号 | 253期号:22页码:9024-9029 |
| 关键词 | 3 omega-method thermal conductivity film/substrate structure critical frequency |
| 英文摘要 | A technique using 3 omega-method with a wide-frequency range from 0.5 Hz to 0.5 MHz was developed to determine simultaneously the thermal conductivities of individual layers in a two-layered structure. The technique utilizes 3 omega measurements in high and low frequency ranges separately. To evaluate the validity and accuracy of the technique, we performed measurements on a double-layered specimen consisting of a SiO2-film on a Si-substrate, and found that the measured conductivities of both the film and substrate agree well with literature values. Uncertainty analysis was given finally. This new technique overcomes a critical shortcoming of conventional techniques, which cannot measure the thermal conductivity of both film and substrate simultaneously. (c) 2007 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Chemistry ; Materials Science ; Physics |
| 关键词[WOS] | TRANSPORT ; SOLIDS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000249484100034 |
| 公开日期 | 2015-12-22 |
| 源URL | [http://ir.etp.ac.cn/handle/311046/106275]  |
| 专题 | 工程热物理研究所_中国科学院工程热物理所（论文库）_期刊论文（SCI） |
| 作者单位 | Chinese Acad Sci, Inst Engn Thermophys, Beijing 100080, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Zhao Liang,Tang, Da Wei,Zheng, Xing Hua. Simultaneous determination of thermal conductivities of thin film and substrate by extending 3 omega-method to wide-frequency range[J]. APPLIED SURFACE SCIENCE,2007,253(22):9024-9029. |
| APA | Wang, Zhao Liang,Tang, Da Wei,&Zheng, Xing Hua.(2007).Simultaneous determination of thermal conductivities of thin film and substrate by extending 3 omega-method to wide-frequency range.APPLIED SURFACE SCIENCE,253(22),9024-9029. |
| MLA | Wang, Zhao Liang,et al."Simultaneous determination of thermal conductivities of thin film and substrate by extending 3 omega-method to wide-frequency range".APPLIED SURFACE SCIENCE 253.22(2007):9024-9029. |
入库方式： OAI收割
来源：工程热物理研究所
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