Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle
文献类型：期刊论文
| 作者 | Zhou, Shaolin1,2; Xie, Changqing3; Yang, Yong4; Hu, Song4; Xu, Xiangmin5; Yang, Jun2 |
| 刊名 | IEEE PHOTONICS TECHNOLOGY LETTERS
 |
| 出版日期 | 2013-09-15 |
| 卷号 | 25期号:18页码:1847-1850 |
| 关键词 | Optical sensing coherent imaging diffraction optical alignment lithography |
| 英文摘要 | We explore the feasibility of a controllable and easy-to-implement moire-based phase-sensitive imaging scheme for in-plane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10(-4) rad even in a manual operation mode by this method. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Optics ; Physics |
| 关键词[WOS] | X-RAY-LITHOGRAPHY ; ALIGNMENT TECHNIQUE ; SYSTEM |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000324335500010 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1168]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.S China Univ Technol, Sch Elect & Informat Engn, London, ON N6A 5B9, Canada 2.Univ Western Ontario, Dept Mech & Mat Engn, London, ON N6A 5B9, Canada 3.Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China 4.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China 5.S China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510641, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Shaolin,Xie, Changqing,Yang, Yong,et al. Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2013,25(18):1847-1850. |
| APA | Zhou, Shaolin,Xie, Changqing,Yang, Yong,Hu, Song,Xu, Xiangmin,&Yang, Jun.(2013).Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle.IEEE PHOTONICS TECHNOLOGY LETTERS,25(18),1847-1850. |
| MLA | Zhou, Shaolin,et al."Moire-Based Phase Imaging for Sensing and Adjustment of In-Plane Twist Angle".IEEE PHOTONICS TECHNOLOGY LETTERS 25.18(2013):1847-1850. |
入库方式： OAI收割
来源：光电技术研究所
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