A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
文献类型：期刊论文
| 作者 | Ren, Hao1; Wang, Weimin2; Tao, Fenggang2; Yao, Jun2 |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2013-12-01 |
| 卷号 | 4期号:4页码:431-443 |
| 关键词 | MEMS out-of-plane actuator electrostatic repulsive force bi-directional microfabrication adaptive optics |
| 英文摘要 | Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 mu m and 0.63 mu m are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 mu m is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Nanoscience & Nanotechnology ; Instruments & Instrumentation |
| 研究领域[WOS] | Science & Technology - Other Topics ; Instruments & Instrumentation |
| 关键词[WOS] | LARGE-SCAN-ANGLE ; ADAPTIVE OPTICS ; DESIGN ; MIRROR ; MICROACTUATORS ; MICROMIRROR ; FABRICATION ; DRIVEN ; PLATE ; ARRAY |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000329707400006 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1176]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Arizona State Univ, Sch Elect Comp & Energy Engn, Tempe, AZ 85287 USA 2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A Bi-Directional Out-of-Plane Actuator by Electrostatic Force[J]. MICROMACHINES,2013,4(4):431-443. |
| APA | Ren, Hao,Wang, Weimin,Tao, Fenggang,&Yao, Jun.(2013).A Bi-Directional Out-of-Plane Actuator by Electrostatic Force.MICROMACHINES,4(4),431-443. |
| MLA | Ren, Hao,et al."A Bi-Directional Out-of-Plane Actuator by Electrostatic Force".MICROMACHINES 4.4(2013):431-443. |
入库方式： OAI收割
来源：光电技术研究所
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