Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
文献类型：期刊论文
| 作者 | Guo, Chun1,2; Kong, Mingdong1; Liu, Cunding1; Li, Bincheng1 |
| 刊名 | APPLIED OPTICS
 |
| 出版日期 | 2013-02-01 |
| 卷号 | 52期号:4页码:B26-B32 |
| 英文摘要 | For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates. (C) 2013 Optical Society of America |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | THIN-FILMS ; TECHNOLOGY ; DEPOSITION ; VACUUM |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000314684600005 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1183]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo, Chun,Kong, Mingdong,Liu, Cunding,et al. Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system[J]. APPLIED OPTICS,2013,52(4):B26-B32. |
| APA | Guo, Chun,Kong, Mingdong,Liu, Cunding,&Li, Bincheng.(2013).Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system.APPLIED OPTICS,52(4),B26-B32. |
| MLA | Guo, Chun,et al."Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system".APPLIED OPTICS 52.4(2013):B26-B32. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。