Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
文献类型：期刊论文
| 作者 | Guo, Chun1,2; Kong, Mingdong1; Lin, Dawei1; Liu, Cunding1; Li, Bincheng1 |
| 刊名 | OPTICS EXPRESS
 |
| 出版日期 | 2013-01-14 |
| 卷号 | 21期号:1页码:960-967 |
| 英文摘要 | Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. (C) 2013 Optical Society of America |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | THIN-FILMS ; EVAPORATION ; GROWTH |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000315988100120 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1196]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition[J]. OPTICS EXPRESS,2013,21(1):960-967. |
| APA | Guo, Chun,Kong, Mingdong,Lin, Dawei,Liu, Cunding,&Li, Bincheng.(2013).Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition.OPTICS EXPRESS,21(1),960-967. |
| MLA | Guo, Chun,et al."Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition".OPTICS EXPRESS 21.1(2013):960-967. |
入库方式： OAI收割
来源：光电技术研究所
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