Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm
文献类型：期刊论文
| 作者 | Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wu, Gaofeng1,2; Liu, Bin1; Wan, Yongjian1 |
| 刊名 | OPTICAL ENGINEERING
 |
| 出版日期 | 2013-03-01 |
| 卷号 | 52期号:3 |
| 关键词 | interferometry surface metrology absolute measurement shift rotation |
| 英文摘要 | We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random-ball-averaging testing method; the root mean square of the residual figure between them is similar to 0.8 nm. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) [DOI: 10.1117/1.OE.52.3.033601] |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | ACCURACY |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000318248000011 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1202]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. OPTICAL ENGINEERING,2013,52(3). |
| APA | Song, Weihong,Wu, Fan,Hou, Xi,Wu, Gaofeng,Liu, Bin,&Wan, Yongjian.(2013).Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm.OPTICAL ENGINEERING,52(3). |
| MLA | Song, Weihong,et al."Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm".OPTICAL ENGINEERING 52.3(2013). |
入库方式： OAI收割
来源：光电技术研究所
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