Absolute measurement of flats with the method of shift-rotation
文献类型：期刊论文
| 作者 | Song, Weihong1,2; Wu, Fan; Hou, Xi1; Zhao, Wenchuan1; Wan, Yongjian1 |
| 刊名 | OPTICAL REVIEW
 |
| 出版日期 | 2013-09-01 |
| 卷号 | 20期号:5页码:374-377 |
| 关键词 | absolute measurement shift-rotation interferometry surface measurements |
| 英文摘要 | We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | OPTICAL-SURFACES ; ACCURACY ; MIRROR |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000325369000004 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1239]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute measurement of flats with the method of shift-rotation[J]. OPTICAL REVIEW,2013,20(5):374-377. |
| APA | Song, Weihong,Wu, Fan,Hou, Xi,Zhao, Wenchuan,&Wan, Yongjian.(2013).Absolute measurement of flats with the method of shift-rotation.OPTICAL REVIEW,20(5),374-377. |
| MLA | Song, Weihong,et al."Absolute measurement of flats with the method of shift-rotation".OPTICAL REVIEW 20.5(2013):374-377. |
入库方式： OAI收割
来源：光电技术研究所
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