A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage
文献类型：期刊论文
| 作者 | Hu, Fangrong1; Li, Zhi1; Qian, Yixian2; Yao, Jun3; Xiong, Xianming1; Niu, Junhao1; Peng, Zhiyong1 |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2012-09-01 |
| 卷号 | 22期号:9 |
| 英文摘要 | This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic 'pull-in' phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 mu m x 300 mu m x 1.5 mu m and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 mu m at 13 V dc, and it shows a good agreement with the simulation. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics |
| 关键词[WOS] | VARIABLE INDUCTOR ; ADAPTIVE OPTICS ; IN INSTABILITY ; DESIGN ; FABRICATION ; MICROMIRRORS ; TRAVEL ; RANGE ; ARRAY |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000308210600033 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/2340]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China 2.Zhejiang Normal Univ, Inst Informat Opt, Jinhua 321004, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Hu, Fangrong,Li, Zhi,Qian, Yixian,et al. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(9). |
| APA | Hu, Fangrong.,Li, Zhi.,Qian, Yixian.,Yao, Jun.,Xiong, Xianming.,...&Peng, Zhiyong.(2012).A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,22(9). |
| MLA | Hu, Fangrong,et al."A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22.9(2012). |
入库方式： OAI收割
来源：光电技术研究所
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