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A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process

文献类型：期刊论文

作者Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1
刊名OPTICAL REVIEW
出版日期2014-05-01
卷号21期号:3页码:280-285
关键词CCOS process power spectral density convolution model spatial frequency domain
英文摘要Quantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors. (C) 2014 The Japan Society of Applied Physics
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Optics
研究领域[WOS]Optics
关键词[WOS]TOOLS ; MODEL
收录类别SCI
语种英语
WOS记录号WOS:000344640900015
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/2414]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
3.State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714		 Wang, Jia,Fan, Bin,Wan, Yongjian,et al. A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process[J]. OPTICAL REVIEW,2014,21(3):280-285.
APA Wang, Jia,Fan, Bin,Wan, Yongjian,Shi, Chunyan,&Zhuo, Bin.(2014).A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process.OPTICAL REVIEW,21(3),280-285.
MLA Wang, Jia,et al."A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process".OPTICAL REVIEW 21.3(2014):280-285.

入库方式： OAI收割

来源：光电技术研究所

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