Fabrication of circular microstructure array based on a controlled diffractive pattern
文献类型：期刊论文
| 作者 | Li, Shuhong1,2; Du, Jinglei1; Zhang, Zhiyou1; Gao, Fuhua1; Gao, Hongtao2; Du, Chunlei2 |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2014-03-01 |
| 卷号 | 115页码:13-15 |
| 关键词 | Lithography Circular microstructure Diffractive pattern |
| 英文摘要 | Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 mu m was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. (C) 2013 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| 关键词[WOS] | RADIALLY POLARIZED-LIGHT ; SURFACE-PLASMONS ; TRANSMISSION ; LITHOGRAPHY ; APERTURE ; BEAM ; LENS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000330502700004 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/2415]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Sichuan Univ, Sch Phys, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. MICROELECTRONIC ENGINEERING,2014,115:13-15. |
| APA | Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,Gao, Fuhua,Gao, Hongtao,&Du, Chunlei.(2014).Fabrication of circular microstructure array based on a controlled diffractive pattern.MICROELECTRONIC ENGINEERING,115,13-15. |
| MLA | Li, Shuhong,et al."Fabrication of circular microstructure array based on a controlled diffractive pattern".MICROELECTRONIC ENGINEERING 115(2014):13-15. |
入库方式： OAI收割
来源：光电技术研究所
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