Method to calculate the error correction ability of tool influence function in certain polishing conditions
文献类型：期刊论文
| 作者 | Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1 |
| 刊名 | OPTICAL ENGINEERING
 |
| 出版日期 | 2014-07-01 |
| 卷号 | 53期号:7 |
| 关键词 | polishing tool influence function computer-controlled optical surfacing power spectral density convolution model spatial frequency errors |
| 英文摘要 | Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. (c) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE) |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | FREQUENCY SURFACE ERRORS ; MODEL |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000341183900046 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/2416]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China 3.State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Jia,Fan, Bin,Wan, Yongjian,et al. Method to calculate the error correction ability of tool influence function in certain polishing conditions[J]. OPTICAL ENGINEERING,2014,53(7). |
| APA | Wang, Jia,Fan, Bin,Wan, Yongjian,Shi, Chunyan,&Zhuo, Bin.(2014).Method to calculate the error correction ability of tool influence function in certain polishing conditions.OPTICAL ENGINEERING,53(7). |
| MLA | Wang, Jia,et al."Method to calculate the error correction ability of tool influence function in certain polishing conditions".OPTICAL ENGINEERING 53.7(2014). |
入库方式： OAI收割
来源：光电技术研究所
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