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High resolution photolithography with sub-wavelength grating

文献类型：期刊论文

作者Zhao, Qing1; Liang, Gaofeng1,2; Wang, Changtao2; Huang, Xiaoping1; Chen, Zexiang3; Luo, Xiangang2
刊名APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
出版日期2014-04-01
卷号115期号:1页码:69-73
英文摘要Based on the theory of surface plasmon resonance and the special nano-optical effect of metal/dielectric multilayer composites, we obtained a high-resolution image of a sub-wavelength grating. We discussed multilayer parameters on equal thickness, and achieved sufficient contrast and high intensity through numerical simulation based on the finite element method. By chosen the best scheme, an experimental of multilayer planar lens lithography has been carried out. The main point is the use of metal-dielectric composites to realize high-resolution image under 365-nm polarization light incidence. By controlling the experimental parameters accurately, a fidelity image is recorded on the photoresist.
WOS标题词Science & Technology ; Technology ; Physical Sciences
类目[WOS]Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]Materials Science ; Physics
关键词[WOS]SILVER SUPERLENS
收录类别SCI
语种英语
WOS记录号WOS:000333612400012
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/2419]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位1.Univ Elect Sci & Technol China, Sch Phys Elect, Chengdu 610054, Peoples R China
2.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
3.Univ Elect Sci & Technol China, Sch Opt Elect Informat, Chengdu 610054, Peoples R China
推荐引用方式
GB/T 7714		 Zhao, Qing,Liang, Gaofeng,Wang, Changtao,et al. High resolution photolithography with sub-wavelength grating[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,2014,115(1):69-73.
APA Zhao, Qing,Liang, Gaofeng,Wang, Changtao,Huang, Xiaoping,Chen, Zexiang,&Luo, Xiangang.(2014).High resolution photolithography with sub-wavelength grating.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,115(1),69-73.
MLA Zhao, Qing,et al."High resolution photolithography with sub-wavelength grating".APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 115.1(2014):69-73.

入库方式： OAI收割

来源：光电技术研究所

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