A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
文献类型：期刊论文
| 作者 | Wang, Weimin1,2,3; Hu, Fangrong4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1 |
| 刊名 | AIP ADVANCES
 |
| 出版日期 | 2014-03-01 |
| 卷号 | 4期号:3 |
| 英文摘要 | A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electromechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 mu m and a fill factor of 95%. The DM can provide a 0.6 mu m stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. (C) 2014 Author(s). |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | ADAPTIVE OPTICS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000334213700018 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/2428]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China 2.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 4.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP ADVANCES,2014,4(3). |
| APA | Wang, Weimin,Hu, Fangrong,Wang, Qiang,Qiu, Chuankai,Chen, Zexiang,&Yao, Jun.(2014).A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction.AIP ADVANCES,4(3). |
| MLA | Wang, Weimin,et al."A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction".AIP ADVANCES 4.3(2014). |
入库方式： OAI收割
来源：光电技术研究所
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