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Experimental study of Talbot imaging moire-based lithography alignment method

文献类型：期刊论文

作者Zhu, Jiangping1,2,3; Hu, Song1; Zhou, Pei1,3; Yu, Junsheng2
刊名OPTICS AND LASERS IN ENGINEERING
出版日期2014-07-01
卷号58页码:54-59
关键词Alignment Moire techniques Gratings Talbot and self-imaging effects
英文摘要A four-quadrant gratings alignment method was presented for proximity lithography, which experimentally achieved the alignment accuracy of nanometer level. The alignment marks consist of gratings with slightly different periods, leading to different Talbot distances with the same monochromatic planar wave. The contrast of moire fringe varies with the gap between mask (alignment mark) and wafer (alignment mark), which will affect the phase comparison, and induce more errors as well. This paper concentrates on the optimization of parameters of alignment marks to achieve the resulting moire fringes with an optimum contrast. By simulation and experiment, we investigate effects of the gap on the contrast, based on which, the design principle of alignment marks is concluded, and it is helpful to the practicability with our proposed alignment method. (C) 2014 Elsevier Ltd. All rights reserved.
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Optics
研究领域[WOS]Optics
关键词[WOS]X-RAY-LITHOGRAPHY ; NANOIMPRINT LITHOGRAPHY ; PROXIMITY LITHOGRAPHY ; FRINGE ; GRATINGS ; SYSTEM ; IMAGES
收录类别SCI
语种英语
WOS记录号WOS:000334818300008
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/2467]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
3.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式
GB/T 7714		 Zhu, Jiangping,Hu, Song,Zhou, Pei,et al. Experimental study of Talbot imaging moire-based lithography alignment method[J]. OPTICS AND LASERS IN ENGINEERING,2014,58:54-59.
APA Zhu, Jiangping,Hu, Song,Zhou, Pei,&Yu, Junsheng.(2014).Experimental study of Talbot imaging moire-based lithography alignment method.OPTICS AND LASERS IN ENGINEERING,58,54-59.
MLA Zhu, Jiangping,et al."Experimental study of Talbot imaging moire-based lithography alignment method".OPTICS AND LASERS IN ENGINEERING 58(2014):54-59.

入库方式： OAI收割

来源：光电技术研究所

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