Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography
文献类型：期刊论文
| 作者 | Li, Jinlong; Hu, Song; Zhao, Lixin |
| 刊名 | OPTIK
 |
| 出版日期 | 2014 |
| 卷号 | 125期号:22页码:6775-6777 |
| 关键词 | Focal plane PGFM Focus control Lithography |
| 英文摘要 | The high-precision focus control technology becomes more and more important, as the effective depth of focus (DOF) shortens dramatically in advanced lithography. In conventional focus control technology, the focal plane of projection lens is assumed as an ideal plane, but in fact it is a curved surface. The difference between the ideal plane assumed and its real shape results in partial defocus of wafer exposure field, thereby affecting the exposure quality. In our current work, the real shape of projection lens focal plane is brought into consideration for the focus control, and the simulation shows that this method can effectively improve the accuracy of focus control by 26%. (C) 2014 Elsevier GmbH. All rights reserved. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | SCANNERS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000344976300035 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/2522]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Jinlong,Hu, Song,Zhao, Lixin. Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography[J]. OPTIK,2014,125(22):6775-6777. |
| APA | Li, Jinlong,Hu, Song,&Zhao, Lixin.(2014).Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography.OPTIK,125(22),6775-6777. |
| MLA | Li, Jinlong,et al."Study of the influence of the shape of projection lens focal plane on the focus control of advanced lithography".OPTIK 125.22(2014):6775-6777. |
入库方式： OAI收割
来源：光电技术研究所
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