中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Broadband-reflecting optical thin films for the far ultraviolet spectral range

文献类型:期刊论文

作者Yang, Minghong1,2; Zhou, Ciming2; Jiang, Desheng2; Shen, Lin3
刊名THIN SOLID FILMS
出版日期2008-11-28
卷号517期号:2页码:878-880
关键词Broadband-reflecting coating Far ultraviolet Thin films Metal mirror
英文摘要We discussed approaches to achieve broadband-reflecting optical thin film coatings for the far ultraviolet spectral region down to 50 nm. The basic strategy was to enhance aluminum coating capping with a bilayer in order to obtain broadband-reflecting optical coatings for this special region. By choosing material combinations and processes, highly-reflecting coatings covering from 110 nm down to 50 urn have been realized. Experimental results show that broadband highly reflective optical coatings with an average of 0.3 in reflectance in the spectral region of 60-110 nm have been achieved with the proposed Al/MgF2/SiC system. (C) 2008 Elsevier B.V. All rights reserved.
WOS标题词Science & Technology ; Technology ; Physical Sciences
类目[WOS]Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]Materials Science ; Physics
关键词[WOS]EXTREME-ULTRAVIOLET ; MULTILAYER COATINGS ; X-RAY ; CONSTANTS ; MIRRORS ; UV ; EXPOSURE ; ANGLES ; LIF ; NM
收录类别SCI
语种英语
WOS记录号WOS:000261693900078
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/3230]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位1.Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
2.Wuhan Univ Technol, Ctr Fiber Sensing, Wuhan 430071, Peoples R China
3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Yang, Minghong,Zhou, Ciming,Jiang, Desheng,et al. Broadband-reflecting optical thin films for the far ultraviolet spectral range[J]. THIN SOLID FILMS,2008,517(2):878-880.
APA Yang, Minghong,Zhou, Ciming,Jiang, Desheng,&Shen, Lin.(2008).Broadband-reflecting optical thin films for the far ultraviolet spectral range.THIN SOLID FILMS,517(2),878-880.
MLA Yang, Minghong,et al."Broadband-reflecting optical thin films for the far ultraviolet spectral range".THIN SOLID FILMS 517.2(2008):878-880.

入库方式: OAI收割

来源:光电技术研究所

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