One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film
文献类型：期刊论文
| 作者 | Zhu, Jianhua1; Jin, Chongwei1; Duan, Xiaoya1; Guo, Yongkang1; Yao, Jun2 |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2009-04-01 |
| 卷号 | 86期号:4-6页码:1096-1098 |
| 关键词 | Microoptical element Microlens array Gray-tone photolithography Silver-halide-sensitized gelatin Enzyme |
| 英文摘要 | Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sensitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11 x 11 gelatin microlens array, are presented in this paper. (C) 2008 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| 关键词[WOS] | LENS ARRAY |
| 收录类别 | SCI ; ISTP |
| 语种 | 英语 |
| WOS记录号 | WOS:000267273300168 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3245]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhu, Jianhua,Jin, Chongwei,Duan, Xiaoya,et al. One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film[J]. MICROELECTRONIC ENGINEERING,2009,86(4-6):1096-1098. |
| APA | Zhu, Jianhua,Jin, Chongwei,Duan, Xiaoya,Guo, Yongkang,&Yao, Jun.(2009).One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film.MICROELECTRONIC ENGINEERING,86(4-6),1096-1098. |
| MLA | Zhu, Jianhua,et al."One-step fabrication of achromatic spherical microlens array on enzyme etched gelatin film".MICROELECTRONIC ENGINEERING 86.4-6(2009):1096-1098. |
入库方式： OAI收割
来源：光电技术研究所
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