Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations
文献类型：期刊论文
| 作者 | Li Wei1,2; Li Bin-Cheng1 |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2009-09-01 |
| 卷号 | 58期号:9页码:6506-6511 |
| 关键词 | modulated free carrier absorption electronic transport properties frequency scans at different pump-to-probe separations multi-parameter fitting |
| 英文摘要 | Based on a three-dimensional modulated free carrier absorption (MFCA) model, simulation was performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers at different pump-to-probe separations and different modulation frequencies. Experiments were performed with a silicon wafer, in which amplitude and phase were recorded as functions of modulation frequencies at several different two-beam separations. The electronic transport properties of semiconductor wafers were determined simultaneously via multi-parameter fitting procedure. These results showed that the method is capable of improving the measurement precision of the simultaneous multi-parameter determination of transport properties. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Physics, Multidisciplinary |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | SI WAFERS ; PHOTOTHERMAL MICROSCOPY ; SENSITIVITY-ANALYSIS ; SILICON-WAFERS ; RADIOMETRY ; BULK ; INTERFACE ; SURFACE ; WAVE |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000270156300102 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3285]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Key Lab Beam Control, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li Wei,Li Bin-Cheng. Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations[J]. ACTA PHYSICA SINICA,2009,58(9):6506-6511. |
| APA | Li Wei,&Li Bin-Cheng.(2009).Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations.ACTA PHYSICA SINICA,58(9),6506-6511. |
| MLA | Li Wei,et al."Modulated free carrier absorption characterization of semiconductor wafers by frequency scans at different pump-to-probe separations".ACTA PHYSICA SINICA 58.9(2009):6506-6511. |
入库方式： OAI收割
来源：光电技术研究所
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