Silicon-on-insulation-based deformable mirror array for adaptive optics
文献类型：期刊论文
| 作者 | Wang, D. J.1; Yao, J.1; Qiu, C. K.1; Hu, F. R.1,2; Fan, T. Q.1 |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2009-05-01 |
| 卷号 | 27期号:3页码:1291-1294 |
| 关键词 | adaptive optics electrostatic actuators finite element analysis light reflection micromachining micromirrors optical arrays silicon-on-insulator surface roughness |
| 英文摘要 | In this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of the device layers of SOI wafers for the reflective surface and electrostatic actuators, the fabrication of the micromirror array is separated from the electronics chip, and then they are bonded together using the flip-chip assembly. The optical reflective membrane formed by the device layer of one SOI wafer is of high quality in terms of flatness and surface roughness; the stroke space is mainly determined by the height of the device layer of another wafer. The simulation results of the actuator performance by the finite element analysis method shows that the stroke is up to 2 mu m at about 70 V actuation voltage and the frequency is about 17.8 kHz. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Physics |
| 关键词[WOS] | FABRICATION |
| 收录类别 | SCI ; ISTP |
| 语种 | 英语 |
| WOS记录号 | WOS:000266500300053 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3316]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Guilin Univ Elect Technol, Coll Elect Engn, Guilin 541004, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, D. J.,Yao, J.,Qiu, C. K.,et al. Silicon-on-insulation-based deformable mirror array for adaptive optics[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2009,27(3):1291-1294. |
| APA | Wang, D. J.,Yao, J.,Qiu, C. K.,Hu, F. R.,&Fan, T. Q..(2009).Silicon-on-insulation-based deformable mirror array for adaptive optics.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,27(3),1291-1294. |
| MLA | Wang, D. J.,et al."Silicon-on-insulation-based deformable mirror array for adaptive optics".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 27.3(2009):1291-1294. |
入库方式： OAI收割
来源：光电技术研究所
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