Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure
文献类型：期刊论文
| 作者 | Yang, Xuefeng; Fang, Liang; Zeng, Beibei; Wang, Changtao; Feng, Qin; Luo, Xiangang |
| 刊名 | JOURNAL OF OPTICS
 |
| 出版日期 | 2010-04-01 |
| 卷号 | 12期号:4 |
| 关键词 | surface plasmons photolithography interference optical waveguides |
| 英文摘要 | Deep subwavelength photolithography with a metallic grating waveguide heterostructure (MGWHS) is presented and numerically demonstrated by a finite-difference time-domain method. This lithography scheme is demonstrated by interference between the diffracted waves of the mask which are enhanced by the surface plasmon polariton (SPP) resonance in this MGWHS. The relationship between the pattern resolution and the thickness of the photoresist is discussed. With proper choices of the dimensions of the proposed MGWHS and the illumination light, either a deep subwavelength (similar to lambda/17) pattern with sufficient contrast or a high quality interference pattern can be achieved. This approach is suitable for application to deep subwavelength photolithography without expensive equipment. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | INTERFERENCE NANOLITHOGRAPHY ; LITHOGRAPHY ; LAYER ; LENS ; NM |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000279943300002 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3325]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yang, Xuefeng,Fang, Liang,Zeng, Beibei,et al. Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure[J]. JOURNAL OF OPTICS,2010,12(4). |
| APA | Yang, Xuefeng,Fang, Liang,Zeng, Beibei,Wang, Changtao,Feng, Qin,&Luo, Xiangang.(2010).Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure.JOURNAL OF OPTICS,12(4). |
| MLA | Yang, Xuefeng,et al."Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure".JOURNAL OF OPTICS 12.4(2010). |
入库方式： OAI收割
来源：光电技术研究所
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