Phase Photon Sieve
文献类型：期刊论文
| 作者 | Jiang, Wenbo1,2; Hu, Song1; Zhao, Lixin1; Yan, Wei1; Yang, Yong1 |
| 刊名 | JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE
 |
| 出版日期 | 2010 |
| 卷号 | 7期号:1页码:228-231 |
| 关键词 | Diffractive Optical Element Phase Photon Sieve Numerical Simulation Lithographic Experiment |
| 英文摘要 | A novel diffractive optical element with high diffractive efficiency and good focusing properties is presented It is a phase photon sieve (PPS) which developed from the structure of Fresnel zone plate. The pinholes of PPS are appropriately distributed over both light zones and dark zones. The design process of the PPS is introduced. The focusing properties of the PPS are analyzed. The good performance of our proposal is demonstrated with numerical simulation and lithographic experiment. It is shown that compared with a conventional photon sieve, the PPS exhibits high diffractive efficiency and a reduced chromatic aberration. As a novel diffractive optical element, the PIPS not only can realize nano-lithography, but also offers new opportunities for high resolution X-ray microscopy and spectroscopy, astronomy, aviation in physical and life sciences. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | LITHOGRAPHY ; MODEL |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000275349400020 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3330]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, Wenbo,Hu, Song,Zhao, Lixin,et al. Phase Photon Sieve[J]. JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,2010,7(1):228-231. |
| APA | Jiang, Wenbo,Hu, Song,Zhao, Lixin,Yan, Wei,&Yang, Yong.(2010).Phase Photon Sieve.JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE,7(1),228-231. |
| MLA | Jiang, Wenbo,et al."Phase Photon Sieve".JOURNAL OF COMPUTATIONAL AND THEORETICAL NANOSCIENCE 7.1(2010):228-231. |
入库方式： OAI收割
来源：光电技术研究所
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