Design and application of phase photon sieve
文献类型：期刊论文
| 作者 | Jiang, Wenbo1,2; Hu, Song1; Zhao, Lixin1; Yan, Wei1; Yang, Yong1,2 |
| 刊名 | OPTIK
 |
| 出版日期 | 2010 |
| 卷号 | 121期号:7页码:637-640 |
| 关键词 | Imaging principle Phase photon sieve Design and fabrication Nano-lithography experiment system |
| 英文摘要 | The imaging principle of Fresnel zone plate and photon sieve were analyzed in this paper. The design and fabrication of phase photon sieve were discussed. The feasibility of using phase photon sieve to realize nano-lithography was analyzed, a novel lithography experiment system based on phase photon sieve was presented, which not only has higher resolution and image contrast than the Fresnel zone plate lithography but also have higher diffractive efficiency than the amplitude photon sieve lithography. (C) 2009 Elsevier GmbH. All rights reserved. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | FRACTAL ZONE PLATES ; LITHOGRAPHY |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000276613200009 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3348]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Jiang, Wenbo,Hu, Song,Zhao, Lixin,et al. Design and application of phase photon sieve[J]. OPTIK,2010,121(7):637-640. |
| APA | Jiang, Wenbo,Hu, Song,Zhao, Lixin,Yan, Wei,&Yang, Yong.(2010).Design and application of phase photon sieve.OPTIK,121(7),637-640. |
| MLA | Jiang, Wenbo,et al."Design and application of phase photon sieve".OPTIK 121.7(2010):637-640. |
入库方式： OAI收割
来源：光电技术研究所
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