A MEMS micromirror driven by electrostatic force
文献类型：期刊论文
| 作者 | Hu, Fangrong1,2; Yao, Jun1; Qiu, Chuankai1; Ren, Hao1 |
| 刊名 | JOURNAL OF ELECTROSTATICS
 |
| 出版日期 | 2010-06-01 |
| 卷号 | 68期号:3页码:237-242 |
| 关键词 | MEMS Micromirror Electrostatic force Pull-in effect Large stroke Out of plane actuation |
| 英文摘要 | A microelectromechanical systems (MEMS) micromirror is demonstrated in this paper. The micromirror is actuated by an electrostatic force and can achieve a large out of plane stroke by eliminating the electrostatic pull-in effect. The micromirror consists of a mirror of 400 mu m by 400 mu m in the center, a spring and three fixed bottom electrodes each side. Design principles and the analytical model are both developed, and they are verified by finite element analysis (FEA). The resonant frequency for the piston movement of the designed micromirror is about 2.5 kHz by FEA simulation. The micromirror prototype has been fabricated by a surface micromachining process and it is successfully tested using a microsystem analyzer. An out of plane stroke of 1.65 mu m is observed at 100 V and it agrees well with the predicted result from analytical model. (c) 2010 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Engineering, Electrical & Electronic |
| 研究领域[WOS] | Engineering |
| 关键词[WOS] | ADAPTIVE OPTICS ; DEFORMABLE MIRROR ; MEMBRANE ; ACTUATOR ; ARRAYS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000278577200005 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3350]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China 2.Guilin Univ Elect Technol, Dept Elect Engn, Guilin 541004, Peoples R China |
| 推荐引用方式 GB/T 7714 | Hu, Fangrong,Yao, Jun,Qiu, Chuankai,et al. A MEMS micromirror driven by electrostatic force[J]. JOURNAL OF ELECTROSTATICS,2010,68(3):237-242. |
| APA | Hu, Fangrong,Yao, Jun,Qiu, Chuankai,&Ren, Hao.(2010).A MEMS micromirror driven by electrostatic force.JOURNAL OF ELECTROSTATICS,68(3),237-242. |
| MLA | Hu, Fangrong,et al."A MEMS micromirror driven by electrostatic force".JOURNAL OF ELECTROSTATICS 68.3(2010):237-242. |
入库方式： OAI收割
来源：光电技术研究所
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