Multilayer pattern transfer for plasmonic color filter applications
文献类型：期刊论文
| 作者 | Kaplan, Alex F.1; Xu, Ting1,2; Wu, Yi-Kuei1; Guo, L. Jay1 |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2010-11-01 |
| 卷号 | 28期号:6页码:C6O60-C6O63 |
| 英文摘要 | Contact printing involves transferring a material deposited on a prepatterned mold directly to a substrate with the application of uniform pressure and temperature. This process has traditionally been used to transfer metal layers to act as electrodes or masks for subsequent etch steps. In this work, the authors propose that devices with multiple layers, such as metal-insulator-metal (MIM) structures, can be transferred over using similar processing techniques. Using a SiO2 grating mold, the authors demonstrate the transfer of a MIM pattern to a flexible polycarbonate substrate in order to create a thin film, reflective color filter. This method could be optimized for roll-to-roll nanoimprint lithography and could be used to efficiently fabricate large-area structures on various substrates for display applications. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3511430] |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Physics |
| 关键词[WOS] | SELF-ASSEMBLED MONOLAYERS ; METAL ; LITHOGRAPHY ; SILICON |
| 收录类别 | SCI ; ISTP |
| 语种 | 英语 |
| WOS记录号 | WOS:000285015200102 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3357]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Univ Michigan, Dept Elect Engn & Comp Sci, Ctr Nanophoton & Spintron, Ann Arbor, MI 48109 USA 2.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu, Peoples R China |
| 推荐引用方式 GB/T 7714 | Kaplan, Alex F.,Xu, Ting,Wu, Yi-Kuei,et al. Multilayer pattern transfer for plasmonic color filter applications[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2010,28(6):C6O60-C6O63. |
| APA | Kaplan, Alex F.,Xu, Ting,Wu, Yi-Kuei,&Guo, L. Jay.(2010).Multilayer pattern transfer for plasmonic color filter applications.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,28(6),C6O60-C6O63. |
| MLA | Kaplan, Alex F.,et al."Multilayer pattern transfer for plasmonic color filter applications".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 28.6(2010):C6O60-C6O63. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。