Design and fabrication of a pyramid wavefront sensor
文献类型：期刊论文
| 作者 | Wang, Aina; Yao, Jun; Cai, Dongmei; Ren, Hao |
| 刊名 | OPTICAL ENGINEERING
 |
| 出版日期 | 2010-07-10 |
| 卷号 | 49期号:7 |
| 关键词 | pyramid wavefront sensor reflective pyramidal mirror mask moving lithography |
| 英文摘要 | A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3461956] |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | X-RAY-LITHOGRAPHY ; ADAPTIVE OPTICS ; MICROLENS ARRAY ; LIGA PROCESS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000280522800009 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3398]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Aina,Yao, Jun,Cai, Dongmei,et al. Design and fabrication of a pyramid wavefront sensor[J]. OPTICAL ENGINEERING,2010,49(7). |
| APA | Wang, Aina,Yao, Jun,Cai, Dongmei,&Ren, Hao.(2010).Design and fabrication of a pyramid wavefront sensor.OPTICAL ENGINEERING,49(7). |
| MLA | Wang, Aina,et al."Design and fabrication of a pyramid wavefront sensor".OPTICAL ENGINEERING 49.7(2010). |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。