An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation
文献类型：期刊论文
| 作者 | Hu, Fangrong2; Wang, Weimin1; Yao, Jun1 |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2011-11-01 |
| 卷号 | 21期号:11 |
| 英文摘要 | A microelectromechanical system (MEMS) spring actuator based on the electrostatic repulsive force is presented. In general, an electrostatic-attractive-force-based actuator has a small stroke because instability results from the electrostatic pull-in effect. Therefore, a great deal of effort has been made to achieve large strokes for various applications. Based on the fact that an asymmetric electric field can produce an electrostatic repulsive force, an out-of-plane actuator has been demonstrated in this paper. The actuator consists of two layers which are parallel to each other. The top layer contains a central mass with a size of 100 mu m x 100 mu m x 2 mu m, and it is suspended by a folding spring. The second layer is fixed to the substrate and works as the bottom electrodes of the actuator. The impacting factors to the repulsive force which consequently affect the displacement of the actuator are analyzed using finite element analysis software, and the optimal structure parameters have been obtained. The actuator is fabricated by the poly-multi-user-MEMS-process (PolyMUMPs); the measured out-of-plane displacement of this actuator reaches 2.7 mu m at 50 V dc, and it shows good agreement with the simulation. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Materials Science, Multidisciplinary ; Mechanics |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Materials Science ; Mechanics |
| 关键词[WOS] | MICROMIRRORS ; FABRICATION ; SYSTEM |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000296771900029 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3451]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China |
| 推荐引用方式 GB/T 7714 | Hu, Fangrong,Wang, Weimin,Yao, Jun. An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2011,21(11). |
| APA | Hu, Fangrong,Wang, Weimin,&Yao, Jun.(2011).An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,21(11). |
| MLA | Hu, Fangrong,et al."An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 21.11(2011). |
入库方式： OAI收割
来源：光电技术研究所
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