Refractive micro lens array made of dichromate gelatin with gray-tone photolithography
文献类型：期刊论文
| 作者 | Yao, J; Cui, Z; Gao, FH; Zhang, YX; Guo, YK; Du, CL; Zeng, HJ; Qiu, CK |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2001-09-01 |
| 卷号 | 57-8页码:729-735 |
| 关键词 | micro-optics element refractive microlens gray-tone photolithography dichromate gelatin enzyme |
| 英文摘要 | A novel method is proposed to fabricate refractive micro lens array using dichromate gelatin (DCG) and an enzyme. DCG has optical properties similar to glass but is sensitive to UV light. The enzyme solution is used to develop the optically exposed DCG instead of a conventional water-isopropanol developer, which greatly enhances the surface relief depth. The continuous surface relief structure is realized by a coded grey-tone mask. A computer program has been developed to code an arbitrary 3D surface relief shape into a grey-tone mask design. The DCG properties and the lithography process are described. The grey-tone coding principle is presented. Unlike the current processes where patterned photoresist relief structure has to be transferred to a substrate material, the fabricated DCG micro lens array can be directly used as an optical element. The new process opens a new route of micro lens fabrication, which is simple and low cost. (C) 2001 Elsevier Science BY All rights reserved. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Optics ; Physics |
| 关键词[WOS] | FABRICATION |
| 收录类别 | ISTP ; SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000171061800097 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3484]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England 2.Sichuan Univ, Dept Phys, Chengdu 610064, Peoples R China 3.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yao, J,Cui, Z,Gao, FH,et al. Refractive micro lens array made of dichromate gelatin with gray-tone photolithography[J]. MICROELECTRONIC ENGINEERING,2001,57-8:729-735. |
| APA | Yao, J.,Cui, Z.,Gao, FH.,Zhang, YX.,Guo, YK.,...&Qiu, CK.(2001).Refractive micro lens array made of dichromate gelatin with gray-tone photolithography.MICROELECTRONIC ENGINEERING,57-8,729-735. |
| MLA | Yao, J,et al."Refractive micro lens array made of dichromate gelatin with gray-tone photolithography".MICROELECTRONIC ENGINEERING 57-8(2001):729-735. |
入库方式： OAI收割
来源：光电技术研究所
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