Semi-classical simulation of atomic deposition in a standing wave laser field
文献类型:期刊论文
作者 | Chen, XZ; Yao, HM; Chen, XN; Zhang, CM |
刊名 | MODERN PHYSICS LETTERS B
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出版日期 | 2004-03-12 |
卷号 | 18期号:5-6页码:233-239 |
关键词 | atom focusing nanofabrication atom-laser interaction |
英文摘要 | An atom lens generated by a near-resonant light standing wave can be used to produce nanometer-scale structures. Our calculations are based on a Monte Carlo scheme and the trajectory tracing method. The influences of optical potential and source imperfection such as velocity spread and beam spread on the shape of chromium feature are analyzed using this approach. Results have shown that the focus depth for real source is longer than that for perfect source. Feature separation can be reduced by changing the detuning of the standing wave laser field from blue to red halfway through the deposition time. |
WOS标题词 | Science & Technology ; Physical Sciences |
类目[WOS] | Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical |
研究领域[WOS] | Physics |
关键词[WOS] | LITHOGRAPHY ; LIGHT ; LENS |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000221809900006 |
公开日期 | 2015-12-24 |
源URL | [http://ir.ioe.ac.cn/handle/181551/3501] ![]() |
专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
作者单位 | Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
推荐引用方式 GB/T 7714 | Chen, XZ,Yao, HM,Chen, XN,et al. Semi-classical simulation of atomic deposition in a standing wave laser field[J]. MODERN PHYSICS LETTERS B,2004,18(5-6):233-239. |
APA | Chen, XZ,Yao, HM,Chen, XN,&Zhang, CM.(2004).Semi-classical simulation of atomic deposition in a standing wave laser field.MODERN PHYSICS LETTERS B,18(5-6),233-239. |
MLA | Chen, XZ,et al."Semi-classical simulation of atomic deposition in a standing wave laser field".MODERN PHYSICS LETTERS B 18.5-6(2004):233-239. |
入库方式: OAI收割
来源:光电技术研究所
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