Profile control technology for high-performance microlens array
文献类型：期刊论文
| 作者 | Du, CL; Dong, XC; Qiu, CK; Deng, QL; Zhou, CX |
| 刊名 | OPTICAL ENGINEERING
 |
| 出版日期 | 2004-11-01 |
| 卷号 | 43期号:11页码:2595-2602 |
| 关键词 | profile control exposure dose function exposure threshold moving-mask lithography aspherical microlens arrays |
| 英文摘要 | A profile formation and control approach has been developed for manufacturing micro-optical elements with continuous profile and deep relief depth. Based on Dill's exposure model, an effective expression for determining the exposure dose function is established by using a supposition of equivalent exposure threshold inside a resist layer. An analytical simplified formula is further deduced by taking absorbance as constant B, and the approximate condition is discussed. For evaluating the simplified formula, the profile error was calculated and analyzed by simulation. With the exposure dose function, the binary mask for manipulating the light distribution by means of a moving-mask lithographic method can be designed. Experimental results are given and show the comparative performance to the required profile and relief depth. A series of refractive microlens arrays with aspherical profiles, a wide range of numerical apertures (0.005 to 0.6), and high fill factors were accomplished in the lab and may be applied to many systems. (C) 2004 society of Photo-Optical Instrumentation Engineers. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | GRAY-SCALE MASKS ; FABRICATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000225249900021 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3503]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol & Micorfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Du, CL,Dong, XC,Qiu, CK,et al. Profile control technology for high-performance microlens array[J]. OPTICAL ENGINEERING,2004,43(11):2595-2602. |
| APA | Du, CL,Dong, XC,Qiu, CK,Deng, QL,&Zhou, CX.(2004).Profile control technology for high-performance microlens array.OPTICAL ENGINEERING,43(11),2595-2602. |
| MLA | Du, CL,et al."Profile control technology for high-performance microlens array".OPTICAL ENGINEERING 43.11(2004):2595-2602. |
入库方式： OAI收割
来源：光电技术研究所
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