中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave

文献类型:期刊论文

作者Chen, XZ; Yao, HM; Chen, XN
刊名ACTA PHYSICA SINICA
出版日期2005-06-01
卷号54期号:6页码:2645-2652
关键词completely off-resonant standing-wave laser field atom focusing nanostructure fabrication
英文摘要The focusing of a thermal atomic beam to nanometer-scale dimensions can be realized by a completely off-resonant standing-wave laser field, which can decrease the difficulty of atom lithography experiments. The effects of atom source on atom focusing are analyzed using the Monte-Carlo scheme and trajectory tracing method, and the simulation results have shown that the effective size of the target has a much more important effect on feature width than beam spread and longitudinal velocity spread. Several methods for improving experiments are presented.
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Physics, Multidisciplinary
研究领域[WOS]Physics
关键词[WOS]BEAM ; LITHOGRAPHY ; FIELD
收录类别SCI
语种英语
WOS记录号WOS:000229684700035
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/3510]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Chen, XZ,Yao, HM,Chen, XN. Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave[J]. ACTA PHYSICA SINICA,2005,54(6):2645-2652.
APA Chen, XZ,Yao, HM,&Chen, XN.(2005).Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave.ACTA PHYSICA SINICA,54(6),2645-2652.
MLA Chen, XZ,et al."Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave".ACTA PHYSICA SINICA 54.6(2005):2645-2652.

入库方式: OAI收割

来源:光电技术研究所

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