A high precision dynamic autocollimator
文献类型:期刊论文
作者 | Shen, MZ; Liao, S |
刊名 | MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI
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出版日期 | 2005 |
卷号 | 295-296页码:337-342 |
关键词 | non-contact measurement optical measurement angular measurement dynamic autocollimator |
英文摘要 | In order to increase the precision of a high speed dynamic autocollimator, which uses quadrate detector, we propose a new method to compensate the residual measuring errors. For this purpose, a multi-tooth rotary table with precision of 0.2 seconds of are is used to calibrate the autocollimator. From the calibration data, a polynomial interpolation compensation algorithm is used. As a result, the measuring accuracy is increased to the order of 0.8 seconds of arc and the sampling speed is not affected. |
WOS标题词 | Science & Technology ; Technology |
类目[WOS] | Materials Science, Ceramics ; Materials Science, Composites |
研究领域[WOS] | Materials Science |
收录类别 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000231595000055 |
公开日期 | 2015-12-24 |
源URL | [http://ir.ioe.ac.cn/handle/181551/3518] ![]() |
专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
作者单位 | Chinese Acad Sci, Inst Opt & Elect, Chengdu, Peoples R China |
推荐引用方式 GB/T 7714 | Shen, MZ,Liao, S. A high precision dynamic autocollimator[J]. MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI,2005,295-296:337-342. |
APA | Shen, MZ,&Liao, S.(2005).A high precision dynamic autocollimator.MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI,295-296,337-342. |
MLA | Shen, MZ,et al."A high precision dynamic autocollimator".MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI 295-296(2005):337-342. |
入库方式: OAI收割
来源:光电技术研究所
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