Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication
文献类型：期刊论文
| 作者 | Chen, XZ; Shi, JP; Luo, XG; Zhang, CM; Chen, XN; Xing, TW; Du, CL; Yao, HM |
| 刊名 | MODERN PHYSICS LETTERS B
 |
| 出版日期 | 2006-02-10 |
| 卷号 | 20期号:4页码:179-187 |
| 关键词 | atom and neutron optics mechanical effects of light on atoms molecules fabrication techniques lithography and ions pattern transfer |
| 英文摘要 | We present a calculation model to investigate the focusing characteristics of an atomic beam in a laser standing wave, taking the wave nature of the atomic propagation into account. The effects of atom source, optical parameters of the laser field and the substrate position on atom focusing axe analyzed. Numerical simulations indicate that the best focusing performance can be obtained by repositioning the substrate or optimizing the longitudinal atomic beam speed, laser intensity and the detuning of the laser beam. The feature width of the nanostructure is mainly determined by the transverse speed distribution of atoms. Some methods for optimizing experimental parameters are suggested. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Physics, Applied ; Physics, Condensed Matter ; Physics, Mathematical |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | LIGHT ; DEPOSITION ; LITHOGRAPHY ; OPTICS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000235741300005 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3529]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Chen, XZ,Shi, JP,Luo, XG,et al. Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication[J]. MODERN PHYSICS LETTERS B,2006,20(4):179-187. |
| APA | Chen, XZ.,Shi, JP.,Luo, XG.,Zhang, CM.,Chen, XN.,...&Yao, HM.(2006).Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication.MODERN PHYSICS LETTERS B,20(4),179-187. |
| MLA | Chen, XZ,et al."Analysis of atom focusing in a standing wave laser field for nanometer-scale fabrication".MODERN PHYSICS LETTERS B 20.4(2006):179-187. |
入库方式： OAI收割
来源：光电技术研究所
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