Geometrical characterization issues of plasmonic nanostructures with depth-tuned grooves for beam shaping
文献类型：期刊论文
| 作者 | Fu, Yongqi; Zhou, Wei; Lim, Lennie E. N.; Du, Chunlei; Luo, Xiangang; Zhao, Zeyu; Dong, Xiaochun; Shi, Haofei; Wang, ChangTao |
| 刊名 | OPTICAL ENGINEERING
 |
| 出版日期 | 2006-10-01 |
| 卷号 | 45期号:10 |
| 关键词 | surface plasmons metal film nanostructure beam shaping |
| 英文摘要 | Design of an enhanced surface plasmon polaritons (SPPs) based nanostructure for the purpose of beam shaping is discussed. An indentation with depth-tuned grooves is presented to realize the beam shaping and extraordinary transmission. The nanostructure is directly fabricated using focused ion beam (FIB) milling on an Ag thin film coated on quartz with a thickness of 200 nm. A large measurement error is found during geometrical characterization of the nanostructures by use of an atomic force microscope (AFM) working in tapping mode. Apex wearing and 34 deg full cone angle of the probe generate the measurement errors during the characterization of nanostructures with a feature size of 200 nm and below. To solve this problem, an FIB trimmed AFM probe is employed in the geometrical characterization. The results show that the error is improved greatly using the trimmed probe. The desired excitation of the SPPs is derived using an optical fiber coupled CCD spectrometer after the modified geometrical characterization. The designed structure can be used as an optical probe for future inspection and detection use. (c) 2006 Society of Photo-Optical Instrumentation Engineers. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | SUBWAVELENGTH APERTURE ; OPTICAL-TRANSMISSION ; LIGHT |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000242527500042 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3537]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Nanyang Technol Univ, Sch Mech & Aerosp Engn, Precis Engn & Nanotechnol Ctr, Singapore 639798, Singapore 2.Chinese Acad Sci, State Key Lab Opt Technol Microfabricat, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Fu, Yongqi,Zhou, Wei,Lim, Lennie E. N.,et al. Geometrical characterization issues of plasmonic nanostructures with depth-tuned grooves for beam shaping[J]. OPTICAL ENGINEERING,2006,45(10). |
| APA | Fu, Yongqi.,Zhou, Wei.,Lim, Lennie E. N..,Du, Chunlei.,Luo, Xiangang.,...&Wang, ChangTao.(2006).Geometrical characterization issues of plasmonic nanostructures with depth-tuned grooves for beam shaping.OPTICAL ENGINEERING,45(10). |
| MLA | Fu, Yongqi,et al."Geometrical characterization issues of plasmonic nanostructures with depth-tuned grooves for beam shaping".OPTICAL ENGINEERING 45.10(2006). |
入库方式： OAI收割
来源：光电技术研究所
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