中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons

文献类型:期刊论文

作者Wei, Xingzhan; Du, Chunlei; Dong, Xiaochun; Luo, Xiangang; Deng, Qiling; Zhang, Yudong
刊名OPTICS EXPRESS
出版日期2008-09-15
卷号16期号:19页码:14404-14410
英文摘要A nanolithography technique based on the interference of surface plasmons (SPs) is proposed and demonstrated to modulate the localized exposure energy. The SP waves participating in interference are excited by two distinct structures, namely, the grating and the nanotaper. Constructive or destructive interference, which ultimately causes an enhanced or reduced modulation to the localized energy, can be obtained merely by adjusting the distance of the grating and the taper. Detailedly speaking, the localized energy can be modulated consecutively with a constant periodicity, and the modulation range of energy is extremely wide, for instance, the maximum energy is nearly 3 orders of magnitude larger than the minimum by our FDTD simulation results. Moreover, since the localized electric field at the taper tip, which leads to the exposure of the photoresist, is extremely sensitive to interference, it suggests a potential way to produce patterns with different depths and critical widths in one chip via beforehand programming and reasonably controlling the corresponding interference of SPs. (c) 2008 Optical Society of America.
WOS标题词Science & Technology ; Physical Sciences
类目[WOS]Optics
研究领域[WOS]Optics
关键词[WOS]BEAM LITHOGRAPHY ; DEEP-ULTRAVIOLET ; 157 NM ; NANOLITHOGRAPHY ; POLARITONS
收录类别SCI
语种英语
WOS记录号WOS:000259271900011
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/3618]  
专题光电技术研究所_光电技术研究所被WoS收录文章
作者单位Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Wei, Xingzhan,Du, Chunlei,Dong, Xiaochun,et al. Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons[J]. OPTICS EXPRESS,2008,16(19):14404-14410.
APA Wei, Xingzhan,Du, Chunlei,Dong, Xiaochun,Luo, Xiangang,Deng, Qiling,&Zhang, Yudong.(2008).Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons.OPTICS EXPRESS,16(19),14404-14410.
MLA Wei, Xingzhan,et al."Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons".OPTICS EXPRESS 16.19(2008):14404-14410.

入库方式: OAI收割

来源:光电技术研究所

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