Micro-optical devices formed by a dynamic photolithographic approach
文献类型：期刊论文
| 作者 | Du, Chunlei; Dong, Xiaochun; Deng, Qiling; Shi, Lifang; Luo, Xiangang; Zhang, Yudong |
| 刊名 | JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
 |
| 出版日期 | 2008-06-01 |
| 卷号 | 10期号:6 |
| 关键词 | microoptical structure microlens array microlithography |
| 英文摘要 | We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | FABRICATION ; ARRAY ; MICROLENSES |
| 收录类别 | SCI ; ISTP |
| 语种 | 英语 |
| WOS记录号 | WOS:000256619700008 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3644]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Du, Chunlei,Dong, Xiaochun,Deng, Qiling,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6). |
| APA | Du, Chunlei,Dong, Xiaochun,Deng, Qiling,Shi, Lifang,Luo, Xiangang,&Zhang, Yudong.(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6). |
| MLA | Du, Chunlei,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008). |
入库方式： OAI收割
来源：光电技术研究所
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