Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique
文献类型：期刊论文
| 作者 | Zhang Xi-Ren1,2; Li Bin-Cheng1; Liu Xian-Ming1,2 |
| 刊名 | ACTA PHYSICA SINICA
 |
| 出版日期 | 2008-11-01 |
| 卷号 | 57期号:11页码:7310-7316 |
| 关键词 | modulated free carrier absorption electronic transport properties radial scan |
| 英文摘要 | A three-dimensional model for the modulated free carrier absorption (MFCA) is developed to measure the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependence of MFCA amplitude and phase on the electronic transport properties at different pump-probe-beam separation and different modulation frequencies is investigated. It is found that the sensitivities of MFCA signal to individual transport parameters increase with increasing two-beam separation. An experiment with a silicon wafer is performed and the carrier lifetime, carrier diffusivity, and front surface recombination velocity are determined simultaneously and unambiguously by fitting the observed values of the MFCA amplitude and phase as functions of the separation between the pump and probe laser spots, measured at several modulation frequencies covering an appropriate range. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Physics, Multidisciplinary |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | SILICON-WAFERS ; RECOMBINATION PARAMETERS |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000260946500099 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3653]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang Xi-Ren,Li Bin-Cheng,Liu Xian-Ming. Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique[J]. ACTA PHYSICA SINICA,2008,57(11):7310-7316. |
| APA | Zhang Xi-Ren,Li Bin-Cheng,&Liu Xian-Ming.(2008).Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique.ACTA PHYSICA SINICA,57(11),7310-7316. |
| MLA | Zhang Xi-Ren,et al."Measurement of electronic transport property of semiconductors by three-dimensional modulated free carrier absorption technique".ACTA PHYSICA SINICA 57.11(2008):7310-7316. |
入库方式： OAI收割
来源：光电技术研究所
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