Micro-optical devices formed by a dynamic photolithographic approach
文献类型：期刊论文
| 作者 | Du, CL ; Dong, XC ; Deng, QL ; et al. |
| 刊名 | JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
 |
| 出版日期 | 2008 |
| 卷号 | 10期号:6页码:Art. No. 064007 JUN |
| ISSN号 | 1464-4258 |
| 中文摘要 | We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated. |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/1933]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室微光学） |
| 推荐引用方式 GB/T 7714 | Du, CL,Dong, XC,Deng, QL,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6):Art. No. 064007 JUN. |
| APA | Du, CL,Dong, XC,Deng, QL,&et al..(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6),Art. No. 064007 JUN. |
| MLA | Du, CL,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008):Art. No. 064007 JUN. |
入库方式： OAI收割
来源：光电技术研究所
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