中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons

文献类型:期刊论文

作者Wei, XZ (Wei, Xingzhan) ; Du, CL (Du, Chunlei) ; Dong, XC (Dong, Xiaochun) ; Luo, XG (Luo, Xiangang) ; Deng, QL (Deng, Qiling) ; Zhang, YD (Zhang, Yudong)
刊名OPTICS EXPRESS
出版日期2008
卷号16期号:19页码:14404-14410 SEP 15
ISSN号1094-4102
中文摘要A nanolithography technique based on the interference of surface plasmons (SPs) is proposed and demonstrated to modulate the localized exposure energy. The SP waves participating in interference are excited by two distinct structures, namely, the grating
收录类别SCI ; EI
语种英语
公开日期2015-12-24
源URL[http://ir.ioe.ac.cn/handle/181551/1939]  
专题光电技术研究所_微电子装备总体研究室(四室微光学)
推荐引用方式
GB/T 7714
Wei, XZ ,Du, CL ,Dong, XC ,et al. Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons[J]. OPTICS EXPRESS,2008,16(19):14404-14410 SEP 15.
APA Wei, XZ ,Du, CL ,Dong, XC ,Luo, XG ,Deng, QL ,&Zhang, YD .(2008).Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons.OPTICS EXPRESS,16(19),14404-14410 SEP 15.
MLA Wei, XZ ,et al."Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons".OPTICS EXPRESS 16.19(2008):14404-14410 SEP 15.

入库方式: OAI收割

来源:光电技术研究所

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