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长春光学精密机械与物... [1]
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OAI收割 [1]
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会议论文 [1]
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2006 [1]
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发表日期:2006
内容类型:会议论文
专题:长春光学精密机械与物理研究所
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The study on the epoxy resin compound X-ray refractive lens (EI CONFERENCE)
会议论文
OAI收割
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
作者:
Wang W.
;
Zhang J.
;
Zhang J.
;
Zhang J.
;
Wang W.
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提交时间:2013/03/25
In this paper
the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first
the theoretical results of the structure parameters for such a device are given. Then
the fabrication technologies are presented. They are deep soft X-ray lithography
mold-manufacturing and molding. The material of X-ray photoresist is PMMA
the mold is made of silicone rubber
and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.