中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
机构
  • 上海微系统与信息技术... [2]
采集方式
内容类型
  • 会议论文 [2]
发表日期
学科主题
筛选

浏览/检索结果: 共2条,第1-2条 帮助

限定条件                    
条数/页: 排序方式:
Direct formation of parallel single-walled carbon nanotube bridges on micromachined wide trenches for high-performance infrared sensors 会议论文  OAI收割
Transducers’09:The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2009
Fu Bo Rao, Tie Li, Yu Xiu Zhou, Xiang Liu, and Yue Lin Wang
收藏  |  浏览/下载:3/0  |  提交时间:2012/05/04
WAFER-LEVEL SANDWICHED PACKAGING FOR HIGH-YIELD FABRICATION OF HIGH-PERFORMANCE MEMS INERTIAL SENSORS 会议论文  OAI收割
IEEE MEMS 2008:21th IEEE International Conference on Micro Electro Mechanical Systems, 2008
Kun Zhang, Wei Jiang, Xinxin Li
收藏  |  浏览/下载:3/0  |  提交时间:2012/05/04