中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
首页
机构
成果
学者
登录
注册
登陆
×
验证码:
换一张
忘记密码?
记住我
×
校外用户登录
CAS IR Grid
机构
长春光学精密机械与物... [1]
采集方式
OAI收割 [1]
内容类型
会议论文 [1]
发表日期
2009 [1]
学科主题
筛选
浏览/检索结果:
共1条,第1-1条
帮助
限定条件
发表日期:2009
专题:长春光学精密机械与物理研究所
第一署名单位
第一作者单位
通讯作者单位
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
题名升序
题名降序
提交时间升序
提交时间降序
作者升序
作者降序
发表日期升序
发表日期降序
Assessment of surface roughness by use of soft x-ray scattering (EI CONFERENCE)
会议论文
OAI收割
Soft X-Ray Lasers and Applications VIII, August 4, 2009 - August 6, 2009, San Diego, CA, United states
Yan-li M.
;
Yong-gang W.
;
Shu-yan C.
;
Bo C.
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2013/03/25
A soft x-ray reflectometer with laser produced plasma source has been designed
which can work from wavelength 8nm to 30 nm and has high performance. Using the soft x-ray reflectometer above
the scattering light distribution of silicon and zerodur mirrors which have super-smooth surfaces could be measured at different incidence angle and different wavelength. The measurement when the incidence angle is 2 degree and the wavelength is 1 lnm has been given in this paper. A surface scattering theory of soft x-ray grazing incidence optics based on linear system theory and an inverse scattering mathematical model is introduced. The vector scattering theory of soft x-ray scattering also is stated in detail. The scattering data are analyzed by both the methods above respectively to give information about the surface profiles. On the other hand
both the two samples are measured by WYKO surface profiler
and the surface roughness of the silicon and zerodur mirror is 1.3 nm and 1.5nm respectively. The calculated results are in quantitative agreement with those measured by WYKO surface profiler
which indicates that soft x-ray scattering is a very useful tool for the evaluation of highly polished surfaces. But there still some difference among the results of different theory and WYKO
and the possible reasons of such difference have been discussed in detail. 2009 SPIE.