机构

• 长春光学精密机械与物... [1]
• 光电技术研究所 [1]

采集方式

• OAI收割 [2]

内容类型

• 会议论文 [2]

发表日期

• 2012 [2]

学科主题

筛选

浏览/检索结果: 共2条，第1-2条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity (EI CONFERENCE) 会议论文  OAI收割 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom 作者:  Du J.;  Shi L.;  Li S. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 To improve the fidelity of nanostructures in transfer process  a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. 2012 IEEE.   A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity 会议论文  OAI收割 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, 2012 作者:  Li, Shuhong;  Shi, Lifang;  Yang, Zheng;  Huang, Xia;  Zhang, Zhiyou 收藏  |  浏览/下载：17/0  |  提交时间：2016/11/24