机构

• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [1]

内容类型

• 会议论文 [1]

发表日期

• 2006 [1]

学科主题

筛选

浏览/检索结果: 共1条，第1-1条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序题名升序题名降序作者升序作者降序发表日期升序发表日期降序 The study on the epoxy resin compound X-ray refractive lens (EI CONFERENCE) 会议论文  OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者:  Wang W.;  Zhang J.;  Zhang J.;  Zhang J.;  Wang W. 收藏  |  浏览/下载：18/0  |  提交时间：2013/03/25 In this paper  the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first  the theoretical results of the structure parameters for such a device are given. Then  the fabrication technologies are presented. They are deep soft X-ray lithography  mold-manufacturing and molding. The material of X-ray photoresist is PMMA  the mold is made of silicone rubber  and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.