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Inverse open loop control of a nano-positioner based on piezo-electric actuators 会议论文  OAI收割
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  
Qiang, Shu;  Rao, Xuejun;  Shi, Ningping
收藏  |  浏览/下载:13/0  |  提交时间:2016/11/24