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	Fuzzy predictive R2R control to CMP process 会议论文 OAI收割 2011 IEEE International Conference on Computer Science and Automation Engineering, CSAE 2011, Shanghai, China, June 10-12, 2011 作者: Wang L(王亮); Hu JT(胡静涛) 收藏 \| 浏览/下载：31/0 \| 提交时间：2012/06/06 Chemical mechanical polishing Clustering algorithms Computer science Controllers Industrial applications Mathematical models Polishing Predictive control systems Semiconductor device manufacture Stripping (removal)
	Novel method for optimizing polishing tool-path in CCOS based on weighted-iterative algorithm (EI CONFERENCE) 会议论文 OAI收割 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China 作者: Zhang X.-J.; Wang X.; Wang X.; Wang X.; Wang X.-K. 收藏 \| 浏览/下载：47/0 \| 提交时间：2013/03/25 In Computer Controlled Optical Surfacing (CCOS) polishing tool-path is the base of solving other control parameters such as dwell time. In order to improve the fabrication results of polishing off-axis aspheric a novel method to optimize the tool-path is discussed in this paper. The optimizing method named weighted-iterative algorithm is according to the balance principle of the particle system. The power factor of each dwell point represents the requirement of dwell density. Considering the factors which influence the polishing result the power factors cosist of three elements include constant error distribution and dwell distance of workpiece edge. The tool-path is solved by numerical iterative method. In the end an error data is simulated with actual parameters using the matrix-based algorithm with two different tool-paths. The one is X-Y uniform spacing model and the other one is to optimize it based on the first. The comparison shows that the results of the optimized one are much better than traditional one especially the rms convergence rate. Theory of the algorithm is simple and exercisable and it satisfies practical requirement as well. 2009 SPIE.
	Active polishing technology for large aperture aspherical mirror and ultra thin mirror 会议论文 OAI收割 Xian, China, 2005-11-2 作者: Xinnan Li; Xiangqun Cui; Bilie Gao 收藏 \| 浏览/下载：37/0 \| 提交时间：2013/12/24 Active stress lap Aspherical mirror polishing Ultra thin mirror Active polishing Computer control polishing
	Recent progress on asphere manufacturing and testing at CIOM (EI CONFERENCE) 会议论文 OAI收割 Advanced Optical Manufacturing and Testing Technology 2000, November 1, 2000 - November 3, 2000, Chengdu, China 作者: Zhang X.; Yu J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 The manufacturing procedure of a 500 mm in diameter f/2 hyperbolic primary mirror based on Computer-Controlled Polishing is introduced in detail. The mirror was finally polished to the shape accuracy of 13 nm rms and the surface roughness of 2 nm Ra. Testing methods and data analysis for different stages ranging from grinding to polishing are discussed. Some critical factors affecting the efficiency and accuracy of the grinding/polishing procedure are summarized. In addition the preliminary work to make large off-axis asphere mirrors is presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed and a possible solution is given. To control the geometrical parameters such as radius of curvature and conic constant a new profiler has been built and it has proven very useful to improve the grinding efficiency. Finally the manufacturing of small aspheres using deterministic grinding tool is also introduced. The fine grinding procedure of LOH's asphere grinding machine is presented.